Sigma SQM-160 User's Guide

SQM-160Rate/Thickness MonitorUser’s GuideVersion 2.0© Copyright Sigma Instruments, Inc. 2000ΣΣSigmainstruments

Chapter 1 Quick Start1-51.5 Film SetupThis section will help you setup the SQM-160 to measure a film. Refer to Chapter 2 fordetailed film programmin

Chapter 1 Quick Start1-61.6 Depositing a FilmIf you have followed this Quick Start chapter, you are ready to deposit a film. Follow theprocedure bel

Chapter 2 Operation2-12.0 IntroductionThis section details the operation of the SQM-160 menus and front panel controls. It isarranged by common user

Chapter 2 Operation2-22.2 Film Parameters SetupThe Film Parameters Menu programs the SQM-160 for the materials that will bedeposited as thin films.

Chapter 2 Operation2-3The diagram and table below detail the parameters available in the Film ParametersMenu:Display Description Range Default UnitsDE

Chapter 2 Operation2-42.3 System Parameters SetupThe System Parameters Menu sets values that pertain to the overall functioning of theSQM-160, and to

Chapter 2 Operation2-5Display Description Range Default UnitsTIMEBASETime required to take a singlemeasurement0.15 – 2.00 0.25 secSIM MODESimulates se

Chapter 2 Operation2-6Display Description Range Default UnitsxTOOLINGTooling value assigned to eachsensor. See the Sensor Toolingsection of this chap

Chapter 2 Operation2-72.4 Sensor SelectionThe SQM-160 comes standard with two sensor inputs. Four additional sensors areavailable by adding a Sensor

Chapter 2 Operation2-82.5 Sensor Min/Max FrequencyThe Sensor Min/Max frequencies establish the operating range for the sensing quartzcrystals. Both

Safety InformationRead this manual before installing, operating, or servicing this equipment. Do not installsubstitute parts, or perform any unauthor

Chapter 2 Operation2-92.6 Sensor ToolingSensor Tooling adjusts for the difference in deposition rate between the sensor and thesubstrate being coated

Chapter 2 Operation2-102.7 Rate/Thickness or Frequency DisplayThe SQM-160 determines deposition rate and thickness by measuring the frequencyshift of

Chapter 2 Operation2-112.9 Zero ThicknessBefore starting each film deposition, you will probably want to reset the SQM-160Thickness value to zero. T

Chapter 3 Options3-13.0 IntroductionThe SQM-160 has two slots to accommodate option cards. The Option A slot holds aFour Sensor Card, which expands

Chapter 3 Options3-23.2 Four Sensor CardThe SQM-160 automatically detects the presence of the Four Sensor Card.Refer to System Connections in Chapter

Chapter 4 MonComm Software4-14.0 IntroductionIncluded with the SQM-160 is a Windows 95/98 program, MonComm. MonComm isused to setup instrument param

Chapter 4 MonComm Software4-24.3 Add and Delete FilmsTo add a new film to the Films List:1. Click the New Film button.2. A film named NewFilm# will b

Chapter 4 MonComm Software4-34.4 Download FilmsTo add or replace a film in the Download List:1. Highlight the desired film by clicking onit in the Fi

Chapter 4 MonComm Software4-44.5 Graph DataThe SQM-160 graphs are accessed by clicking the Graph button.Two graphs of data from the SQM-160 can be di

Chapter 4 MonComm Software4-5To Adjust the Graph’s Scope:1 Select the Configure menu followed by the Graph sub menu item to display thegraphs configur

Warranty InformationThis Sigma Instruments product is warranted against defects in material andworkmanship for a period of 1 year from the date of shi

Chapter 4 MonComm Software4-64.7 Edit System ParametersSystem Parameters are accessed by clicking on the Config menu item followed by theSystem sub m

Chapter 5 Maintenance5-15.0 IntroductionWARNING: There are no user adjustments, or serviceable parts, inside the SQM-160.For maintenance or repair,

AppendixA. Material ParametersMaterial Density ZFactor Material Density ZFactorAluminum 2.73 1.08 Manganese 7.2 0.377Aluminum Oxide 3.97 1 Manganese

AppendixB. SpecificationsMeasurement Number of Sensors Frequency Range Frequency Accuracy Frequency Resolution Rate Accuracy Rate R

AppendixC. I/O ConnectionsA 15-pin female D-sub connector is included with the instrument to connect digital I/O tothe SQM-160 Relay I/O connector.

AppendixD. Declaration of ConformityManufacturer’s Name: Sigma InstrumentsManufacturer’s Address: 1318 Duff DriveFort Collins, CO 80524 USAdeclares

Table of ContentsChapter 1 Quick Start1.0 Introduction ...

Chapter 5 Maintenance5.0 Introduction...

Chapter 1 Quick Start1-11.0 IntroductionCongratulations on your purchase of the SQM-160 Deposition Rate/Thickness Monitor.The SQM-160 is an easy-to-u

Chapter 1 Quick Start1-21.2 Front PanelFront Panel ControlsDisplay 1 Displays rate and thickness in normal operation.Displays setup parameter name in

Chapter 1 Quick Start1-31.3 Rear PanelRear Panel ConnectionsSensor 1 & 2 Connection to quartz crystal sensor remote oscillator. SeeSection 1.4 f

Chapter 1 Quick Start1-41.4 System ConnectionsThe diagram and table below identifies typical vacuum system components and theirfunction.System Compon