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SQC-122c
User's Guide
Sigma SQC-122c User's Guide Page 33
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Chapter 2
Operation
2-
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SQC-122c
1
User’s Guide
1
Safety Information
2
Safety Symbols
2
Warranty Information
3
Limitation of Warranty
3
Return Policy
3
Table of Contents
4
Chapter 2 Operation
4
Chapter 3 Menus
4
Chapter 4 Options
4
Appendix
5
1.0 Introduction
6
1.2 Front Panel
7
1.3 Rear Panel
8
1.4 System Connections
9
Chapter 1 Quick Start
10
1.5 Installation
10
1.6 Process Setup
11
1.7 Depositing a Film
13
2.2 Defining a Film
15
Chapter 2 Operation
15
2.0 Introduction
15
2.1 Definitions
15
2.3 Defining a Process
19
2.4 Sensor Setup
21
2.5 Source Setup
24
2.6 Running a Process
25
2.7 Loop Tuning
29
2.8 Troubleshooting
31
Chapter 3 Menus
34
3.0 Introduction
34
3.1 Main Menu
35
3.2 Next Menu Screens
37
3.3 Quick Setup Menu
38
3.4 Process Menus
40
3.5 Film Menus
44
3.6 System Parameters Menu
51
3.7 I/O Setup
54
Chapter 4 Options
57
4.0 Introduction
57
4.1 Option Card
57
A. Material Parameters
58
B. Specifications
59
C. I/O Connections
61
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