Sigma SQC-122c User's Guide download pdf (Page 45)

Chapter 3 Menus

3-12

The material to be deposited is the most significant film parameter. However, a film

definition also includes the setup parameters shown below:

I Term

Sensor 1

Sensor 2

Output

Pocket

Max Power

Slew Rate

Crystal Quality Disabled

10.0

76.0

Out1

0.7

Out1/Out2

On/Off

Sec.

RATE(A/s)

0.0

Film Edit Menu

Film

Conds.

Deposit

Controls

Exit to

Main

Edit

THICKNESS(kA)

0.000

POWER(

0.0

My Process 1 Editing: Aluminum

Parameter

Value

Units

P Term 50 None

D Term 0.0

Sec.

Film Tooling

100

Exit to Main

Returns to the Main Menu.

Returns to the Film Select Menu.

Edit

Selects the highlighted parameter for edit. SoftKey functions

change to:

Next: Store parameter and move to next for editing.

Cancel:

Stop editing and

undo changes to selected parameter.

Enter: Stop editing and save values for selected parameter.

Control Knob: Turn to adjust value. Push to store value and

move to next parameter.

Film Conds.

Displays pre/post conditioning settings (See 2.6).

Deposit Controls

Displays deposition control settings (See 2.2).

Control Knob

Scrolls through the list of film parameters.

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Sigma SQC-122c User's Guide Page 45

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